Water/Wastewater

  • System for High-flow TOC Reduction

System for High-flow TOC Reduction

Aug 15 2012 Read 1100 Times

Siemens Water Technologies (USA) have recently introduced their Vanox Advanced Oxidation Process (AOP). This is a high-flow solution aimed at Total Organic Carbon (TOC) reduction in semiconductor manufacturing applications. This system has been designed to meet all International Technology Roadmap for Semiconductors (ITRS) requirements for the future by having a capacity to treat hundreds of gallons per minute. The Vanox system can consistently reach TOC levels of 0.5 ppb whilst treating seasonal TOC variations in water. This is an important performance measurement, as organic carbon elevations above 1.0 ppb can directly affect the manufacturing process, impacting product yields at every stage where the product comes in contact with water.

Research suggests that the species of a TOC is as important as the amount of it. The Vanox AOP system aims to attack the TOC species that have the greatest impact on microelectronic productions. Such productions include urea, which historically have proven difficult to remove using conventional methods. The Vanox AOP system removes and/or controls urea primarily associated with THMs (trihalomethane) such as chloroform, which is generated as a byproduct from the use of chlorine. The system also addresses IPA, another difficult-to-control primary organic that can require more involved treatment.

The Vanox AOP solution offers the ability to scale systems for future flow and TOC demands through a modular design coupled with the process ability to set the TOC effluent where the technology node requires it to be.

The Vanox system will offer 365 day/24 hour uptime. The platform uses only the power that is required to meet demand meaning energy consumption is reduced By utilising a suite of customised analytical measurement tools, the Vanox AOP system offers continuous process control and access to streaming process data for constant tracking of the system and the environmental parameters it is responding to.

 

Reader comments

Do you like or dislike what you have read? Why not post a comment to tell others / the manufacturer and our Editor what you think. To leave comments please complete the form below. Providing the content is approved, your comment will be on screen in less than 24 hours. Leaving comments on product information and articles can assist with future editorial and article content. Post questions, thoughts or simply whether you like the content.

Post a Comment




Events

World Water Week 2019

Aug 25 2019 Stockholm, Sweden

Aquatech Mexico

Sep 03 2019 Mexico City, Mexico

The Green Expo 2019

Sep 03 2019 Mexico City, Mexico

NSC Congress & Expo

Sep 06 2019 San Diego, CA, USA

ICMGP 2019

Sep 08 2019 Krakow, Poland

View all events